Abstract
Products of micro systems engineering are nowadays composed of different functional components and are manufactured and assembled by combining micro systems and precision engineering methods. In addition to using silicon,the material which was initially favoured, it is now possible to employ function relevant e.g. electric conductors, magnetic optical and smart materials, and there is a tendency to develop low-cost mass production processes. Although micro systems technology nowadays applies hybrid structures micro products distinctly differ from macroscopic functional elements to which the same requirements are made because there is a need to meet specifications to both manufacture and assembly. The examples given in the report below are intended to explicate this fact and make relevant suggestions.
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