Abstract

The technological possibilities of submicrosecond (10−9−10−6s) ion beams in ranges of power density of 106−109 W/cm2 and particle energy of 1–2000 keV as well as mechanisms of erosion of metal surfaces under their effect are considered. The large significance of collective processes associated with radiation heating of the surface is shown. A model for description of erosion is suggested according to which the flux of atoms of the target leaving the irradiated surface consists of two independent components caused by collisional sputtering and evaporation, respectively. The effect of parameters of irradiation on the erosion coefficient and on the ratio of factors of sputtering and evaporation is analyzed.

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