Abstract
The technology of deep proton lithography in PMMA (poly methyl methacrylate) is a fabrication method for monolithic integrated refractive micro-optical elements and micro-mechanical holder structures, which allows structural depths in the order of several hundred microns[l.21. Different optical functions can he fabricated in one block and form monolithic integrated optical systems. In addition mechanical support structures and alignment features can he integrated with these optical systems. This paper will focus mainly on the technological requirements of the irradiation, development and diffusion setups. which are necessary to achieve predictable and reproducible results with deep proton lithography.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
