Techniques for microwave measurements of ferroelectric thin films and their associated error and limitations

Abstract

This paper examines the problem of evaluating the microwave properties of thin ferroelectric films patterned as planar capacitors. Two types of microwave measurements of ferroelectric thin films are considered: reflection- and resonance-type measurements. Algorithms are presented for evaluation of capacitance–permittivity and dielectric loss. Using sensitivity analysis, the error and limitations associated with these measurements are estimated. The end result is a series of formulae that use the network analyser's measurement data to calculate the capacitance–permittivity, the dielectric loss and the associated error.