Abstract
Two methods enabling depth heterogeneity to be recognized and taken into account in quantitative analysis have been elaborated and then applied to various samples. The first method involves predicting the Kα/Kβ (or L lines) ratios for all identified elements. The second method is based on comparing the spectra measured on different geometric arrangements. In particular, sample tilting makes identification of depth heterogeneities possible. If the sample is heterogeneous, the heights of some peaks in the X-ray spectra change according to the depth distribution of the corresponding elements. Monte Carlo simulations with the MCNP4C2 code can be used to predict these changes and interpret the experimental results.
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