Technical trends of large-size photomasks for flat panel displays

Abstract

Currently, flat panel displays (FPDs) are one of the main parts for information technology devices and sets. From 1990's to 2000's, liquid crystal displays (LCDs) and plasma displays had been mainstream FPDs. In the middle of 2000's, demand of plasma displays declined and organic light emitting diodes (OLEDs) newly came into FPD market. And today, major technology of FPDs are LCDs and OLEDs. Especially for mobile devices, the penetration of OLEDs is remarkable. In FPDs panel production, photolithography is the key technology as same as LSI. Photomasks for FPDs are used not only as original master of circuit pattern, but also as a tool to form other functional structures of FPDs. Photomasks for FPDs are called as Large Photomasks(LSPMs), since the remarkable feature is Size which reaches over 1- meter square and over 100kg. In this report, we discuss three LSPMs technical topics with FPDs technical transition and trend. The first topics is upsizing of LSPMs, the second is the challenge for higher resolution patterning, and the last is “Multi-Tone Mask” for Half -Tone Exposure.