Abstract
A kind of zirconia-coated carbonyl-iron-particles (CIPs), which show long-time stability against aqueous, is installed in magnetic compound fluid (MCF) to polish PMMA. Performance (normal polishing force and surface roughness) of zirconia-coated CIP based MCF slurry with different CIP concentrations is investigated. For comparison, the performances of the conventional non-coated CIP (i.e., HQ) based MCF slurry and MRF slurry in which DI-water is employed instead of MF are also examined. In the presence of Al2O3 abrasive particles, the use of zirconia-coated CIP based MCF slurry can not result in better polishing performances compared with conventional HQ CIP based MCF slurry; In the absence of Al2O3 abrasive particles, higher normal polishing force and smoother work-surface were obtained with the zirconia-coated CIP based MCF slurry rather than the MRF slurry; For the zirconia-coated CIP based MCF slurry without abrasive particles, the concentration of zirconia-coated CIP should be less than a certain value (in the current work, 70 wt. %), otherwise MCF slurry shows bad particle dispersion and is easily dried, resulting in the loss of its polishing ability.
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