Abstract

We examined the magnetostriction and coercive force of amorphous Tb-Fe films sputter-deposited under different conditions (rf input power, Ar gas pressure, Tb content, etc.). Here we discuss the possibility of obtaining both soft magnetic properties and a large magnetostriction in this system. Soft magnetic properties and large magnetostriction were obtained simultaneously in sputtered Tb-Fe thin films prepared with a Tb content of 45 to 50 at%, under an Ar gas pressure of 4 mTorr and with an rf input power of 200 W. This material has strong potential for use in magnetomechanical thin-film devices.

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