Abstract
Optimized hygroscopic film preparation and high-precision manufacturing guarantee the humidity sensor expected properties on sensitivity, hysteresis, response/recovery speed, reliability, etc. This paper demonstrated a comprehensive prioritization scheme on the premise of industrial production. Raw materials mixtures such as pyromellitic dianhydride (PMDA)/p-phenylenediamine (p-PDA), and PMDA/oxydianiline (ODA) were investigated to solve the issue of film surface collapse. Polyacrylonitrile (PAN) is adopted as an additive to enhance the film reliability (maximum of 0.15 % measurement error rate in 120 h continuous testing) as well as assistance in the film coating process. Rutile TiO2 with the average particle size of 0.33 μm was employed as doping elements to reduce the hysteresis to 0.95 % relative humidity (RH), increase the sensitivity to 0.94 pF/% RH, and limit the response/recovery time within 40 s. The film-growth quality and the consistency of production performance were assured by the integrated-passive-device (IPD) fabrication process.
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