Abstract
AlN/glass composite is low-fired substrate material for microelectronic packaging material. In this work, AlN/glass sheets were prepared by tape casting process. The dispersion, stabilization and the rheological properties of the slurry were studied. The optimum drying condition and mechanisms of debinding were also investigated. The results showed that powder size influenced the optimum content of dispersant and the viscosity of slurry. The slurry for tape casting exhibited a typical shear-thinning behavior. Smooth green tape without cracking was acquired after it was dried at solvent atmosphere. The binder was fully burned out at 600°C at low heating speed. The lamination with uniform microstructure was achieved by hot-pressed at 900°C.
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