Abstract
Tantalum pentoxide (Ta2O5) thin films have been deposited at room temperature by single and dual ion beam deposition (IBS and DIBS, respectively) for applications as a waveguide in biosensors. X-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy and X-ray diffraction have been employed, among others, to establish composition, bonding structure and crystallinity of the films. The optical properties were established by variable angle ellipsometry, UV/VIS spectroscopy and direct measurements of the optical losses. Provided the oxygen partial pressure during deposition is high enough, stoichiometric Ta2O5 films are obtained, which are amorphous and extremely smooth. Their refractive index is in the range of 2.05–2.2, while the optical losses are below 3 dB/cm. Finally, in view of applications in biosensors experiments are presented to functionalize the surfaces of these films with amine and epoxy groups.
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