Tantalum oxide and nitride spectral features from a laser-produced plasma

Abstract

We report measurements of time-resolved Ta, TaO and TaN emission spectroscopic signatures from a laser-produced plasma. Plasmas were generated using 1064 nm, 6 ns pulses from an Nd:YAG laser focused onto a pure Ta metal target in a gaseous environment with varying percentages of O2/N2 for controlling gas-phase oxidation/plasma chemistry. Time-resolved analysis showed that Ta oxide emission is prominent at later times in plasma evolution, whereas strong atomic emission is present at early times in air. Emission spectral features as a function of O2 partial pressure showed that TaO emission intensity increases, while the peak intensity of TaO appears earlier with increasing O2 availability. We also report emission spectra of TaN, and show that plasma chemistry favors TaO formation instead of TaN when O2 is present in the environment.