Abstract

Alloy chemistry and deposition conditions can strongly influence the structure and properties of nanostructured materials. However, in Ni-Mo-W alloys, the limited influence of deposition rate on the twin spacing compels the exploration of other routes to tailor the structure and properties. This study was undertaken to investigate the effect of composition and substrate temperature on the nanotwin spacing of sputter-deposited Ni-Mo-W alloys. Increasing the Ni content from 84 at.% to 93 at.% doubled the average twin spacing from 1.8 nm to 3.8 nm, while raising the substrate temperature from room temperature to 200°C for a fixed Ni content of 91 at.% resulted in an increase from 2.9 nm to 5.0 nm. Concurrent weakening of the {111} texture occurred with both increased Ni and temperature. The combined effectiveness of composition and temperature demonstrated here provides a potential process window for tuning the twin spacing while maintaining the strongly textured columnar structure.

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