Abstract
Modulating the soft magnetic properties of amorphous magnetic thin films is important for constructing energy-efficient and high performance thin film inductors. Here, a metal (Pt) and an oxide (Al2O3) are selected as the covering layer to investigate the effect of the interfacial microstructure on the magnetic properties of CoZrTa thin films. The results show that the magnetic dead layer thickness (tDL) and coercivity (Hc) decrease and saturation magnetization (Ms) increases with the annealing temperature for the CoZrTa/Al2O3 sample. However, tDL, Hc, and Ms of the CoZrTa/Pt sample show an opposite variation tendency with the annealing temperature. Interfacial structural results indicate that different magnetisms can be ascribed to different interfacial oxygen migration and interfacial diffusion processes. The effective interfacial oxygen migration in CoZrTa/Al2O3 reconstructs oxygen atom distribution at the interface and provides an effective way to enhance the magnetic properties of CoZrTa, whereas the intensified interfacial diffusion between CoZrTa and Pt after annealing in the CoZrTa/Pt sample caused the deterioration of the magnetism. This study will be helpful in advancing the development of magnetic thin film inductor devices.
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