Abstract
Modern optical measurement technologies such as structured light microscopy or fringe-projection profilometry rely fundamentally on structured illumination of the specimen or probe. Miniaturizing the applied illumination concept enables the availability of these methodologies even in spatial domains that have remained inaccessible so far. Here we introduce a design methodology to realize complex illumination patterns with high diffraction efficiencies in a strongly miniaturized and functional integrated approach. This is achieved by combining the advantages of refractive freeform wavefront tailoring and diffractive beam shaping. This novel concept overcomes classical stray light issues known from conventional diffractive beam shaping and remains valid for micro-optical systems, i.e., beyond the geometric optical regime. Moreover, the design process is in particular optimized to reduce the aspect ratio of the obtained surface features. This strongly improves the manufacturability and as-built performance of the designed optical element, and the feasibility of the approach is demonstrated by the design and realization of monolithic beam shaping units on the tips of optical fibers via two-photon direct laser writing. This provides the means to realize complex illumination patterns in an integrated and mechanically flexible approach.
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