Abstract
A tactile sensor consisting of microcantilevers has been fabricated using the NiCr-thin-film strain gauge with low noise by surface micromachining and the slippage has been detected by using the fabricated tactile sensor array. The NiCr alloy thin film of Cr: 75wt% has very low temperature coefficient of resistance (TCR) and is employed to suppress the temperature noise and drift. The fabricated tactile sensor with the NiCr thin film (Cr: 75wt%) has linear dependencies of the resistance on normal and shear forces, and shows lower noise and temperature drift than that with conventional NiCr (Cr: 20wt%) film. Normal and shear forces measured by fabricated sensor well coincide with applied forces with errors of 3–3.5 kPa. Moreover, the gripping status of the robotic hand was detected by using fabricated tactile sensor array, and the slipping condition can be judged at the rate of 76.5%.
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