Abstract
This paper presents the advanced version of novel piezoelectric oxide semiconductor field effect transistor (POSFET) devices-based tactile sensing chip. The new version of the tactile sensing chip presented here comprises of a 4 × 4 array of POSFET touch sensing devices and integrated interface electronics (i.e., multiplexers, high compliance current sinks, and voltage output buffers). The chip also includes four temperature diodes for the measurement of contact temperature. Various components on the chip have been characterized systematically and the overall operation of the tactile sensing system has been evaluated. With new design, the POSFET devices have improved performance (i.e., linear response in the dynamic contact forces range of 0.01-3 N and sensitivity (without amplification) of 102.4 mV/N), which is more than twice the performance of their previous implementations. The integrated interface electronics result in reduced interconnections which otherwise would be needed to connect the POSFET array with off-chip interface electronic circuitry. This paper paves the way for CMOS implementation of full on-chip tactile sensing systems based on POSFETs.
Highlights
T OUCH sensing plays an important role in various application domains such as robotics, electrotextiles, prosthetics, and medical instrumentation
The Interface Electronic (IE) comprises of basic circuit elements only as one of the goals is to evaluate the effect of the unique challenges related to piezoelectric oxide semiconductor field effect transistor (POSFET) fabrication on the working of on-chip circuitry
The IE blocks are fully compliant with the operating constraints of the POSFET devices; the optimal setting of the POSFET operating point can be achieved as it has been experimentally proved
Summary
T OUCH sensing plays an important role in various application domains such as robotics, electrotextiles, prosthetics, and medical instrumentation. For this reason, Micro-Electro-Mechanical Systems (MEMS) based miniaturized touch sensors with on-chip electronics have been explored in past [5], [6]. The integrated interface electronics results in reduced wires which otherwise would be needed to connect the POSFET array with offchip readout circuitry This is a significant advantage for applications such as robotics where wiring between sensors and electronics is considered a major issue.
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