Table Top Soft X-ray Laser Used for Fabrication of Periodic Nanostructures

Abstract

In this paper we report the fabrication of periodic structures utilizing a soft X-ray (SXR) table top laser and Talbot printing. Patterns are first recorded in photoresist, which are then used as sacrificial mask to transfer nanofeatures into noble metals. The laser source used in these experiments is a 46.9 nm table top capillary laser which enables a high spatial resolution to this lithography tool. The smallest critical dimension achieved was 40 nm.