Abstract
热处理对离子束溅射Ta<sub>2</sub>O<sub>5</sub>薄膜特性的影响
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https://doi.org/10.3788/ope.20142210.2645
Journal: Optics and Precision Engineering | Publication Date: Jan 1, 2014 |
Citations: 2 |
热处理对离子束溅射Ta<sub>2</sub>O<sub>5</sub>薄膜特性的影响
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