Abstract
Nanotubular Ta2O5- and TiO2-based structures were prepared by atomic layer deposition ofTa2O5 andTiO2 thin films, conformally on pore walls of porous alumina membranes. Both self-supportingalumina membranes and Si-supported thin-film membranes were studied as templates. LongTa2O5 andTiO2 nanotubes were prepared successfully with the self-supporting membranes. TheTiO2 nanotubes showed photocatalytic activity in methylene blue degradation under UV illumination. TheTa2O5 andTiO2 nanotubes were further modified by depositing Pt nanoparticles inside them. TheSi-supported thin-film membranes were used as templates for the preparation of robustTa2O5-coated Ni nanorod arrays on a Si substrate using electrodeposition, chemical etching andatomic layer deposition. In addition to photocatalysis, the nanostructures prepared in thiswork may find applications as other catalysts and as solid-state or electrochemicalcapacitors.
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