Abstract
Regular arrays of vertical 200-nm-diameter hollow Ta tubes were grown by glancing angle deposition (GLAD) onto Cr nanoring patterns that were fabricated by positive-resist e-beam lithography followed by nondirectional Cr deposition and a lift-off process. During GLAD, nanorods nucleate around the edges of the patterned rings, broaden, and merge to form tubes with 50-nm-thick walls. The nanotubes remain open during continued growth, with a slight (13%) decrease in the effective inner diameter for an increasing tube height from 200 to 600 nm. These results demonstrate that complex patterned two-dimensional shapes can be extended into the third dimension using the GLAD process.
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Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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