T1601-1-3 圧電MEMS可変ミラーの開発および補償光学への応用(マイクロナノダイナミクスの計測と制御・マイクロナノメカトロニクス(1))

Abstract

Piezoelectric MEMS deformable mirrors have been developed for high resolution retina imaging using adaptive optics. For the low voltage drive, piezoelectric PZT thin films-were used to actuate the mirror surface. In this study, we fabricated hexagonal 61-element actuator array to enhance the performance of image correction. In order to reduce the dead space for the lead lines between the actuators, the polyimide insulating layer was coated on the surface of the PZT actuators and lead lines were prepared with the connection to each element. The displacement of each actuator was measured by using a lasor Doppler vibrometer and we confirmed a relatively large displacement of more than 1μm by applying a voltage of lOVpp. Furthermore, we measured the relationship input voltage and displacement and fabricated DMs actuated linearly when applied -20〜20Vpp.