Abstract
The objective of this study is to establish a micro to nano-gram level mass measurement method using mechanical resonance of a cantilever type chip-calorimeter. A resonance of the cantilever with a tiny sample is automatically tuned by a positive feed back system, which detects a motion of the cantilever and shakes it after adjusting a phase of the vibration. An accuracy of the resonance mass measurement method was evaluated by analyzing an effect of a sample position on the cantilever and an added mass of air. Also, resolution of the mass measurement was evaluated with deposition and sublimation phenomena of Menthol. It was demonstrated that the measurement accuracy of 20 ng and the resolution of 1 ng.
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