T0501-4-1 金属表面のエネルギー適応係数に関する研究([T0501-4]マイクロ・ナノスケールの熱流体現象(4))

Abstract

The micro flows such as flow around MEMS (Micro Electro Mechanical System), are so-called the high-Knudsen number flow. In these flows, the gas-surface interaction becomes important. The energy accommodation coefficient, which is an empirical parameter defined by Knudsen, is often used to analyze heat transport phenomena. The energy accommodation coefficient varies depending on the combination of surface and gas. Thus, it is important to use the appropriate energy accommodation coefficient for each pair of surface and gas for accurate thermal management. In this report, we obtained the energy accommodation coefficients for argon and oxygen in contact with platinum surface by the Low-Pressure (LP) method, using the theoretical heat flux equation expanded to transition regime. The experimental results were compared with the previous results by Thomas and Olmer(1943), which reported a relation between the energy accommodation coefficient and the surface temperature. Our results are in good agreement with their results.