T-Site Trapped Molecular Hydrogen in Hot Wire a-Si:H

Abstract

ABSTRACTProton NMR and proton-29Si double resonance NMR have been performed on hot wire a-Si:H films deposited from SiH4. Results are compared with those from conventional plasma enhanced chemical vapor deposition a-Si:H. Proton nutational angle studies and proton-29Si spin-echo double resonance (SEDOR) signals at 80 and 294 K indicate that a significant proton resonance population arises from T-site-trapped molecular H2. The hot wire films also display a ≥80 kHz FWHM uperbroad proton line and a sharp feature diamagnetically shifted by 25 ppm.