Systematic Study of Resonant Pattern in Ellipsoidal Microwave Cavities

Abstract

Resonant pattern in ellipsoidal microwave cavities were analyzed systematically in this article. Electric field distribution in cavities with different sizes was calculated by the finite difference time-domain method (FDTD). The results of the simulation show that, the microwave fed in though antenna, two different transmission patterns be formed in the microwave cavities, when the R and Z were properly chosen．In the first case, only one strong electric field area was formed at the bottom of the ellipsoidal cavity. For the second case, two main strong electric-field areas around the focal points, resonant series “TM0mn” mode were also found, the size of ellipsoid resonant cavities reveals obvious regularity in the resonant series, the electric-field shape of a resonant mode is similar with each other except that the intensity of the two main strong electric-field areas. In the same resonant mode, z has a good linear correlation with r. the research results of the ellipsoidal microwave cavities with two main strong electric-field areas will provide more choices for design new plasma reactors.