Systematic evaluation of the radial polarized piezoelectric ceramic micro-tube for high-temperature microfluidics

Abstract

Piezoelectric ceramic micro-tube (PCMT) featuring quick response and driving displacement resolution has been widely applied in the microfluidic field. With more and more microfluidic applications being conducted in high temperatures, there is an increased demand for high-temperature PCMTs. However, few reports were focused on evaluating the performance of PCMTs especially in high-temperature conditions, which hinders its applications greatly. In this paper, a radial polarized high-temperature PCMT with an inner diameter (ID) of 0.75 mm, an outer diameter (OD) of 1.2 mm and a length of 15 mm was fabricated first. Scanning electron microscope (SEM) test shows that this ceramic tube presents a homogenous and dense microstructure. Impedance spectrum tests at different temperatures show that the effective electromechanical coupling factor (keff) of this PCMT remains stable from room temperature to 250 °C, indicating good high-temperature stability. Quasi-steady axial displacement tests executed by the instrument constructed by our group show that this PCMT represents a linear driving response under 100 V. Based on systematic evaluations, the PCMT was used to fabricate a piezoelectric high-temperature nozzle for generating high-frequency droplets, through which tin droplet targets with a repetition frequency of 20 kHz and a diameter of 100 μm was obtained at 250 °C. The successful application demonstrates that the PCMT which was evaluated systematically can be used in practical high-temperature applications.