Abstract
AbstractA parameter study of multilayered sensor structures is presented. These consist of planar microwave resonators coated with a thin, sensitive membrane. The influence of the various layers on the sensor characteristics is studied, and design rules are formulated. Two sensors with a moisture‐sensitive coating are realized. The experimental results confirm the simulation. © 2002 John Wiley & Sons, Inc. Microwave Opt Technol Lett 32: 21–25, 2002.
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