Abstract

A robust topology optimization method is presented to consider manufacturing uncertainties in tailoring dispersion properties of photonic crystal waveguides. The under, normal and overā€etching scenarios in manufacturing process are represented by dilated, intermediate and eroded designs based on a threshold projection. The objective is formulated to minimize the maximum error between actual group indices and a prescribed group index among these three designs. Novel photonic crystal waveguide facilitating slow light with a group index of ng = 40 is achieved by the robust optimization approach. The numerical result illustrates that the robust topology optimization provides a systematic and robust design methodology for photonic crystal waveguide design.

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