Systematic analysis of the Rayleigh–Wood anomalies and the symmetry relations of 2D‐periodic nanostructures by imaging spectroscopic ellipsometry

Abstract

AbstractPeriodic arrays of metallic nanostructures were fabricated by electron beam lithography and studied by means of spectroscopic imaging ellipsometry in the near infrared to ultraviolet spectral ranges. The sample consists of gold nanodisc and nanorod gratings on a silicon substrate. Spectroscopic imaging ellipsometry, allowing for the simultaneous observation of all gratings with microscopic resolution, was used to systematically analyze the varying grating and nanostructure parameters. The ellipsometric spectra obtained for a full in‐plane sample rotation proved to be a highly sensitive measure of the gratings’ Rayleigh–Wood anomalies. Their dependence on the sample azimuth was in excellent agreement with the Rayleigh lines calculated from the grating parameters and could be tracked for both the ambient‐to‐grating and the grating–substrate interfaces. Contrary to other studies on similarly sized nanoparticle arrays, we found no indication of localized plasmon resonance in the visible range of the spectrum, but only a weak NIR response truncated by the Rayleigh lines. Finally, the symmetry of the structures was investigated by imaging Mueller‐matrix measurements.