Abstract
Recently, consumer applications have dramatically created the demand for low-cost and compact gyroscopes. Therefore, on the basis of microelectromechanical systems (MEMS) technology, many gyroscopes have been developed and successfully commercialized. A MEMS gyroscope consists of a MEMS device and an electrical circuit for self-oscillation and angular-rate detection. Since the MEMS device and circuit are interactively related, the entire system should be analyzed together to design or test the gyroscope. In this study, a MEMS vibratory gyroscope is analyzed based on the system dynamic modeling; thus, it can be mathematically expressed and integrated into a circuit simulator. A behavioral simulation of the entire system was conducted to prove the self-oscillation and angular-rate detection and to determine the circuit parameters to be optimized. From the simulation, the operating characteristic according to the vacuum pressure and scale factor was obtained, which indicated similar trends compared with those of the experimental results. The simulation method presented in this paper can be generalized to a wide range of MEMS devices.
Highlights
Microelectromechanical systems (MEMS) vibratory gyroscopes are among the most commercialized MEMS products
The work described in this paper presents a method for system modeling of a MEMS vibratory gyroscope and its integration into an electrical circuit to simulate the entire system
It was implemented in the circuit simulation (PSPICE) to analyze the entire system consisting of the MEMS device and electrical circuit
Summary
Microelectromechanical systems (MEMS) vibratory gyroscopes are among the most commercialized MEMS products. A MEMS vibratory gyroscope can be decomposed into a MEMS device and electrical circuit components. To simulate the MEMS device components, the MEMS structure and dynamics are usually analyzed using the lumped-parameter model [9,10,11,12,13]. Equivalent circuit models have been suggested to represent the dynamics of MEMS devices [14,15,16,17] and are integrated into commercial software, namely, MATLAB Simulink (Natick, MA, USA) [18,19]. The work described in this paper presents a method for system modeling of a MEMS vibratory gyroscope and its integration into an electrical circuit to simulate the entire system
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