Abstract
Reduced Order Modeling (ROM) of MEMS has become state of the art for fast component and system level simulations. Based on the well known modal decomposition technique, the automatic generated macromodel is no longer simplified to rigid body and lumped parameter approximations. It retains the true flexible characteristics of electromechanical structures and is able to capture mechanical nonlinearities (Stress-Stiffening), electrostatic fringing fields and large signal behavior with the same order of accuracy as the corresponding FE-model. After a brief description of the ROM approach, the following paper is focused on a new capability of the macromodel which couples nodal degree of freedoms of the FE-model and modal degrees of freedom used for the internal governing equations of the ROM. The new interface is necessary to model temporary displacement constrains, to couple several ROMs together and to analyze system with mechanical contact.
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