System identification of a dual-stage XY precision positioning table

Abstract

Abstract The purpose of this study is to develop a micro/nano-meter XY precision positioning table, in which the coarse and fine positionings are performed by the permanent magnet synchronous motor (PMSM) and piezoelectric actuator (PA), respectively. The main contribution is to identify the XY table driven by the PM and PA, where the Bouc-Wen hysteresis phenomenon of the PA and cross-coupling effects between the X and Y axes are included. In system identification, the real-coded genetic algorithm (RGA) method is employed to find the optimized parameters, where the parameter identification is divided into the individual and integral identifications, and their numerical simulations and experimental results are compared. In conclusion, the dual-stage XY precision positioning table driven by the PM and the PA including the cross-coupling and hysteresis phenomenon can be successfully identified, and it is found that the identified parameters by the integral identification are better.