System and process learning in a full-field, high-power EUVL alpha tool

William P Ballard,Henry N Chapman,Kenneth A Goldberg,Samuel Ponti,Steven J Haney,Daniel A Tichenor,Kenneth L Blaedel,John B Wronosky,Joel R Darnold,Randall J St Pierre,Eric M Gullikson,Terry A Johnson,James L Van De Vreugde,Philip A Grunow,Mark D Zimmerman,Therese L Porter,Yon E Perras,Layton C Hale,Harry Shields,Gary E Sommargren,Tony G Smith,William C Replogle,Sang Hun Lee,Leonard E Klebanoff,Alvin H Leung,Robert E Lafon,Donna J O’connell ,Patrick Naulleau ,John S Taylor,Richard Campiotti ,Karen L Jefferson,Luis J Bernardez ,Daniel J Knight ,D Buchenauer ,P K Barr ,Kenneth Williams ,R J Anderson ,Samuel Graham

doi:10.1117/12.482791

System and process learning in a full-field, high-power EUVL alpha tool

William P Ballard, Henry N Chapman + Show 36 more

https://doi.org/10.1117/12.482791

Copy DOI

Publication Date: Jun 13, 2003

Citations: 7

Affiliation: Lawrence Berkeley National Laboratory, Lawrence Livermore National Laboratory, TRW Automotive (United States), Intel (United States), W.M. Keck Observatory

#Laser-produced Plasma Source #Laser-produced Plasma + Show 8 more

Abstract
Full-Text
Similar Papers

Abstract

Full-field imaging with a developmental projection optic box (POB 1) was successfully demonstrated in the alpha tool Engineering Test Stand (ETS) last year. Since then, numerous improvements, including laser power for the laser-produced plasma (LPP) source, stages, sensors, and control system have been made. The LPP has been upgraded from the 40 W LPP cluster jet source used for initial demonstration of full-field imaging to a high-power (1500 W) LPP source with a liquid Xe spray jet. Scanned lithography at various laser drive powers of >500 W has been demonstrated with virtually identical lithographic performance.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Similar Papers

Paper Title

Journal

Date

Author

View more papers

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.