Synthetic Data in Quantitative Scanning Probe Microscopy.

David Nečas,Petr Klapetek

doi:10.3390/nano11071746

Abstract

Synthetic data are of increasing importance in nanometrology. They can be used for development of data processing methods, analysis of uncertainties and estimation of various measurement artefacts. In this paper we review methods used for their generation and the applications of synthetic data in scanning probe microscopy, focusing on their principles, performance, and applicability. We illustrate the benefits of using synthetic data on different tasks related to development of better scanning approaches and related to estimation of reliability of data processing methods. We demonstrate how the synthetic data can be used to analyse systematic errors that are common to scanning probe microscopy methods, either related to the measurement principle or to the typical data processing paths.

Highlights

Scanning probe microscopy (SPM) is one of the key techniques in nanometrology [1,2,3].It records the sample topography—possibly together with other physical or chemical surface properties—using forces between the sharp probe and sample as the feedback source
We demonstrate how the synthetic data can be used to analyse systematic errors that are common to scanning probe microscopy methods, either related to the measurement principle or to the typical data processing paths
Use of synthetic data can significantly save time when evaluating uncertainties in quantitative SPM, but can allow analysis of individual uncertainty components that would be otherwise jumbled together if only experimental data were used. This helps with improvement of the quantitative SPM technique from all points of view: data collection, processing of measured data and even basic understanding of phenomena related to the method

Summary

Introduction

Scanning probe microscopy (SPM) is one of the key techniques in nanometrology [1,2,3]. It records the sample topography—possibly together with other physical or chemical surface properties—using forces between the sharp probe and sample as the feedback source. SPM has an exceptional position among nanometrological measurement methods when it comes to topography characterisation. Apart of versatility and minimum sample preparation needs its main benefit in nanometrology is the simple metrological traceability compared to some other microscopic techniques. Achieving a very high spatial resolution is, a demanding task and instruments are prone to many different systematic errors and imaging artefacts. The goal of nanometrology is to provide metrological traceability, i.e., an unbroken chain of calibrations starting from top level etalons, down to the microscopes

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Discussion

Conclusion