Abstract

Several patterns of nanostructures ZnO thin films were successfully synthesized by wet process technique. The nanostructures ZnO thin films were prepared by employing a crystal growth method with zinc nitrate tetrahydrate and ethanol as precursor and solvent, respectively. The resulting mixed solutions were deposited on the different kinds of substrate to yield the variation patterns of nanostructures ZnO including nanorod, flower-like, nanosheet and needle-like patterns. Due to the lack of oxygen on ZnO structure, Al and Sn atom were used as modifier of nanostructure ZnO to enhance the electrochemical properties since we exposed various volatile compounds to it. The crystalinity and compositions were investigated by x-ray diffraction (XRD) and energy dispersive spectroscopy (EDS). The nanostructure pattern and surface morphology were confirmed by using scanning electron microscopy (SEM). Moreover, to obtain sensing performance, the nanostructures ZnO were tested in gas sensor testing system consisting of test chamber, data acquisition systems, temperature and gas flow controller.

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