Abstract
This chapter discusses the synthesis of titanium iron oxide (Ti-Fe-O) thin films prepared by pulsed laser deposition. An intermetallic compound of TiFe is known as one of the reversible hydrogen storage alloys. In recent years, for the use of hydrogen permeable films or nickel-hydrogen batteries, it is demanded to prepare the thin films of such hydrogen storage alloys. Although TiFe thin films is prepared by sputtering and thermal evaporation methods, the crystallized thin films can only be obtained by heat-treatment after the deposition. Recently, Suzuki et al reported preparation of Ti-Fe thin films without heat-treatments by pulsed ion-beam evaporation; however, the thin films contain secondary phases. The chapter prepares Ti-Fe-O thin films by a pulsed laser deposition (PLD) method without the heat-treatment after the deposition. By changing the composition of titanium and iron contents in the thin film, it successfully synthesized a thin film containing a TiFe phase.
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