Abstract
A novel high-precision vacuum microelectronic accelerometer has been successfully fabricated and tested in our laboratory. This accelerometer has unique advantages of high sensitivity, fast response, and anti-radiation stability. It is a prototype intended for navigation applications and is required to feature micro-g resolution. This paper briefly describes the structure and working principle of our vacuum microelectronic accelerometer, and the mathematical model is also established. The performances of the accelerometer system are discussed after Matlab modeling. The results show that, the dynamic response of the accelerometer system is significantly improved by choosing appropriate parameters of signal detecting circuit, and the signal detecting circuit is designed. In order to attain good linearity and performance, the closed-loop control mode is adopted. Weak current detection technology is studied, and integral T-style feedback network is used in I/V conversion, which will eliminate high-frequency noise at the front of the circuit. According to the modeling parameters, the low-pass filter is designed. This circuit is simple, reliable, and has high precision. Experiments are done and the results show that the vacuum microelectronic accelerometer exhibits good linearity over -1 g to +1 g, an output sensitivity of 543 mV/g, and a nonlinearity of 0.94 %.
Highlights
High precision accelerometers find many applications such as acoustic measurement, seismology and navigation
The main problem of weak current detection is the noise and drift, so this paper focuses on a high-precision, low-noise I/V
For high sensitivity and good performance, the system analysis and a high precision signal detecting circuit of a vacuum microelectronic accelerometer were studied in this paper
Summary
High precision accelerometers find many applications such as acoustic measurement, seismology and navigation. Micro-machined accelerometers have been developed with different working principles [1,2,3]. With the fast development of modern science and technology, the micro accelerometers are required to have better performance, such as high precision, good stability and linearity, low power consumption, high temperature resistance, etc. Exploration and research on high performance micro accelerometers is still a hot research topic. One is the exploration of new principles and novel structures, and the other is the design of an appropriate signal detecting circuit, which will directly influence the characteristics of the accelerometer system
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