Abstract
The present work represents the approach to develop the novel functional material for gas micro- and nanosensors. The isolated porous silicon arrays have been synthesized using the electrostatic mask method in the electro-chemical chamber. The hybrid material ‘carbon nanotubes-porous silicon’ has been synthesized on the isolated porous silicon arrays with the CVD process. The nanocomposite structure has been synthesized by tin sputtering on the hybrid material ‘carbon nanotubes-porous silicon’. The morphology and electro-physical properties of the nanocomposite structures have been investigated. The test gas sensor based on the nanocomposite structures showed high sensitivity to NO2 molecule absorption at room temperature.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
