Abstract
The nitridation processes of TiH2 in NH3 and N2 were investigated for comparing the efficiency and understanding the nitridation behavior in the present study. The stoichiometric TiN layer always formed firstly and subsequently acted as the barrier to the complete nitridation. NH3 produced the stoichiometric TiN layer more quickly and was therefore not a good N-supplying resource. The combined use of ultrafine TiH2 and N2 successfully synthesized the stoichiometric TiN powder. The critical particle size was optimized at 5.1 µm.
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