Synthesis of spherical powder by the plasma polymerization of tetraethoxysilane

Abstract

Plasma polymerization with an automatic matching system was carried out for the synthesis of spherical powders using tetraethoxysilane (TEOS) as a precursor, and relationships between plasma parameters and powder properties were investigated. An effect of the addition of H 2O to TEOS plasma for the removal of the organic components on powder formation was also investigated. Under most conditions, white spherical powders with mono-dispersed, chained and coagulated state were formed. It was found that powder production rate and particle size of the powder were a function of input power when the powders were synthesized from TEOS alone. The mean particle size varied from 0.13 to 0.32 μm depending on plasma condition. When H 2O was mixed, however, the mean particle size was independent of plasma condition at 0.15 μm. H 2O was found to be effective in reducing organic components in the powder compared with O 2 and Ar.