Abstract
The coatings based on ZrN are formed by the vacuum-arc plasma-assisted process under the conditions of plasma filtering from the droplet phase. A comprehensive investigation of the coating properties, elemental and phase compositions, and structure is performed by the methods of present-day materials science. The modes of deposition, at which the resulting coatings exhibit the lowest roughness (0.03 μm), the highest hardness (up to 30.5 GPa), a relatively low friction coefficient (0.39), and a low wear parameter (up to 2.2·10–6 mm3/(N·m)), are determined. Using the X-ray diffraction data, it is identified that the coatings consist of ZrN-crystallites with a cubic-lattice.
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