Abstract
The synthesis of silicon microspheres is of outmost importance, especially for the production of optical and electrical devices due to their unique properties displayed by this material. In this paper, we review the research on the synthesis of silicon microspheres, including one physical method, the drop method and several chemical methods, such as vapor-phase reaction, vapor-solid reaction, liquid phase reaction and magnesio-thermal reduction method. The formation mechanisms for silicon microsphere particles are also summarized.
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