Synthesis of Si–C–N–Fe layers from volatile organosilicon precursors and ferrocene. part I. synthesis, chemical and phase composition of iron-containing layers prepared by thermal decomposition of ferrocene

Abstract

Thermodynamic modeling of system Fe–C–H–He at total pressure P tot 0 = 10–2–10 Torr in the temperature range of 300–1300 K has been carried out to determine the conditions in which the iron-containing layers can be synthesized from a gaseous mixture of ferrocene (C5H5)2Fe and helium He. Using the results of thermodynamic modeling we have developed a process for the deposition of iron-containing layers during high-temperature decomposition of the initial gas mixture (C5H5)2Fe + He in the temperature range of 1073–1273 K. The synthesized iron-containing layers have been characterized using the following methods: Raman spectroscopy, FTIR spectroscopy, energy-dispersive spectroscopy, X-ray photoelectron spectroscopy, X-ray diffraction with synchrotron radiation, as well as scanning electron and atomic force microscopy. It has been found that using silicon substrate Si(100), phases of iron silicide and carbon nanotubes are formed in the iron-containing layers, and when using substrates of fused silica—a mixture of iron carbide, iron silicide, and carbon nanotubes. Films consisting of iron carbide and carbon materials are deposited on sapphire substrates.