Synthesis of representative critical path circuits considering BEOL variations for deep sub-micron circuits

Abstract

The proportion of interconnect delay in the critical path on a chip is increasing and becomes over 20% in sub-10nm technologies, which means in order to capture post-Si performance accurately, the representative critical path circuit should reflect not only FEOL (front-end-of-line) but also BEOL (back-end-of-line) variations. Since the number of BEOL metal layers exceeds ten and the layers have variation on resistance and capacitance intermixed with resistance variation on vias between them, a very high dimensional design space exploration is necessary to synthesize a representative critical path circuit which is able to provide an accurate performance prediction. To this end, we propose a BEOL-aware methodology of synthesizing a representative critical path circuit, which is able to incrementally explore, starting from an initial path circuit on the post-Si target circuit, routing patterns (i.e., BEOL reconfiguring) as well as gate resizing on the path circuit. Precisely, our synthesis framework of critical path circuit integrates a set of novel techniques: (1) extracting and classifying BEOL configurations for lightening design space complexity, (2) formulating BEOL random variables for fast and accurate timing analysis, and (3) exploring alternative (ring oscillator) circuit structures for extending the applicability of our work. In summary, our synthesis framework is able to reduce the prediction error by 54% and 19% on average over that using the conventional critical path replica and using the conventional method exploiting gate sizing only, respectively.