Abstract
This paper proposes a new atmospheric pressure plasma (APP) deposition system with direct-injection nozzle (modified-APPDS) for depositing the polyvinylidene fluoride (PVDF) thin film. In the modified-APPDS, the key parameters such as length of guide-tube, distance of bluff-body, gas composition, and gas flow rates are examined for generating glow-like intense plasma. As a result, the intense glow-like plasma generated broadly by the modified-APPDS can uniformly deposit the PVDF thin film, which is confirmed by field emission-scanning electron microscopy (FE-SEM) and Fourier transforms-infrared spectroscopy (FT-IR).
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