Abstract

Hydrothermal method enables to synthesize high quality piezoelectric materials. To shorten the reaction time and to get higher quality materials, we propose an ultrasonic irradiation to the solution during the hydrothermal method. We named it ultrasonic assisted hydrothermal method (UAHTM). We have synthesized lead-free piezoelectric material and PZT thin film and the effect of UAHTM have been confirmed. In this study, we tried to improve UAHTM. First, to generate powerful and stable ultrasonic irradiation at high temperature on UAHTM, we developed a new transducer using LiNbO3 single crystal. Second, to prevent contamination to the materials, A Teflon cover on the tip of transducer was attached.

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