Synthesis of nanodisperse anorganic powders by low temperature plasma processing

Abstract

The peculiarities of a low pressure nonthermal plasma seem suitable especially for the synthesis of nanodisperse anorganic powders. Results are presented on the synthesis of finedisperse SiC-, SiO 2 -, and Si 3 N 4 -powders obtained by plasma processing in a low pressure hf-discharge and their analytical characterization. The powders from nonthermal plasma processing differ from powders from thermal plasmas especially by a smaller particle size and by a close size distribution. The results obtained indicate that powder formation in a nonthermal plasma runs via the same reaction route as in a thermal plasma. Studies on powder synthesis in a nonthermal-plasma seem useful for gaining new informations on the modifikation of powder properties by processing parameters.