Synthesis of Nanocomposite TiSiCN Coatings by Titanium Evaporation and Organosilicon Compound Activation in Hollow Cathode Arc Discharge.

Andrey Menshakov,Ivan Zhidkov,Andrey Kukharenko,Yulia Bruhanova

doi:10.3390/membranes12030321

Abstract

TiSiCN coatings have been obtained by anode evaporation of titanium and the decomposition of hexamethyldisilazane in an arc discharge, using a self-heated hollow cathode, at the pressure rate of 1 mTorr of the Ar+N2 gas mixture. The proposed method makes it possible to independently and widely change the amount of metal and precursor vapor flows, the pressure and composition of the vapor-gas mixture and the degree of ionic interaction on the surface of the growing coating within a single discharge system. The paper presents the method and the results of the effect of a current discharge (10–50 A), and the flux of precursor vapours (0–1 g/h), on deposition rates, compositions, and properties of TiSiCN coatings deposited by an advanced combined PVD+PECVD method. Dense homogeneous TiSiCN coatings up to 6 µm thick and up to 27.5 GPa in hardness were obtained at 7.5 µm/h. The composition of the obtained coatings has been studied by X-ray diffraction and X-ray photoelectron spectroscopy, and it has been shown that the presented methods can form nanocomposite coatings with nanocrystallites TiC, TiN, and TiCxN1−x 3–10 nm in the amorphous matrix based on SiCN.

Highlights

Received: 20 February 2022Nanocomposite TiSiCN coatings are one of the most promising protective wearresistant coatings due to their unique properties
One of the major problems in ensuring the stability of the discharge system during the production of organosilicon precursor coatings is that, during their plasma-chemical decomposition in the discharge, coatings with high dielectric properties are formed and the surface of the anode needs to be cleaned to ensure a stable combustion of the discharge and to prevent deterioration of the current-voltage characteristics thereof
In the absence of ion etching of the anode, the discharge voltage in the active gas medium containing organosilicon precursors (OSCs) vapours gradually increases during the coating application process, indicating the formation of a dielectric film anode on the surface, which, in the end, could result in the discharge being extinguished

Summary

Introduction

Nanocomposite (nc) TiSiCN coatings are one of the most promising protective wearresistant coatings due to their unique properties. The advantage of this nc structure, usually consisting of nano-dimensional Ti (C, N) crystallites embedded in the amorphous. TiSiCN shows a 5–10 times higher resistance to dust erosion than many nitride coatings [7], which makes them promising for protecting the blades of gas-turbine engines. These titanium-based coatings have high bio-compatibility, making them attractive in the field of bio-medicine [8] that requires, in addition to high wear resistance, high adhesion to titanium alloys implants. The conditions and the method of their synthesis have a certain effect on the properties of coatings

Methods

Results

Conclusion