Abstract
Controlled composite materials arrays have been widely applied for their unique physical and chemical properties, with the aim of developing nanodevices functionality. Nanosphere lithography is a successful technique for fabricating highly ordered arrays of various materials. In this work, the polystyrene colloidal crystal template in large area on Si substrate was obtained via dipping method. The thickness of the single layer template fabricated can be precisely controlling the particle concentration and the film formation speed. The ordered arrays of Fe2O3 nanowires were obtained via convenient spin method on this template and heat treatment subsequently. Finally, the uniform Al/Fe2O3 arrays were produced by magnetron sputtering method. These periodic composite arrays cover large area substrates (of dimensions > 1 cm × 1 cm) and are uniform in terms of nanowire height and density. The arrays thickness and gaps between nanowires are easily controlled by either the diameter of colloidal crystal or the parameters of magnetron sputtering.
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